Zobrazeno 1 - 10
of 37
pro vyhledávání: '"H. Steffes"'
Publikováno v:
Sensors and Actuators B: Chemical. 127:210-216
In this paper we report on the optical gas sensitivity of a sputtered multilayer system consisting of InxOyNz thin films and gold-nano-clusters. This system shows a reversible change in the optical absorption (increase or decrease of absorbance) duri
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::eb67480be07e9879609a53b720dfac8a
https://doi.org/10.1016/j.snb.2007.07.017
https://doi.org/10.1016/j.snb.2007.07.017
Publikováno v:
Microelectronic Engineering. 83:1197-1200
In this paper we present new results achieved with a sputtered multilayer system consisting of In"xO"yN"z and gold-nano-dots. This system shows not only electrical but also optical gas sensitivity. The optical sensing effect is enhanced by the gold-n
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e7cd48327544aeb9ada015a008d639d6
https://doi.org/10.1016/j.mee.2006.01.153
https://doi.org/10.1016/j.mee.2006.01.153
Publikováno v:
Sensors and Actuators A: Physical. :12-17
This paper reports on the thermal analysis of a novel micro hotplate design for metal oxide gas sensors. The hotplate is a 500 μm × 500 μm square shaped membrane made of 2 μm thick polycrystalline 3C–SiC on a silicon substrate suspended by four
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6b471665f50a333f80f431c359c3322f
https://doi.org/10.1016/j.sna.2005.03.028
https://doi.org/10.1016/j.sna.2005.03.028
Publikováno v:
IEEE Sensors Journal. 4:232-236
In this paper, we describe the optical and electrical gas-sensing properties of In/sub x/O/sub y/N/sub z/ films with an ultrathin gold promoter overlayer. We have fabricated In/sub x/O/sub y/N/sub z/ films with a nanocrystalline porous structure by R
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f316588c75248bc9582296f2f8bdd91b
https://doi.org/10.1109/jsen.2004.823656
https://doi.org/10.1109/jsen.2004.823656
Autor:
H. Steffes, E. Obermeier
Publikováno v:
Sensors and Actuators B: Chemical. 95:252-257
A new combination of gas sensitive materials based on In x O y N z and Ta 2 O 5 capable of detecting traces of combustible gases (CO, H 2 , and CH 4 ) is presented. Compared to pure In x O y N z films (∼120 nm), In x O y N z films using a thin (∼
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c72f6770f5f7925cafbde1dc4a300e37
https://doi.org/10.1016/s0925-4005(03)00436-2
https://doi.org/10.1016/s0925-4005(03)00436-2
Publikováno v:
Sensors and Actuators A: Physical. :264-270
The wall-shear-stress is the force parallel to a surface caused by a flow, which propagates parallel to the surface. Although there are several methods in use, there is a lack of sensors able to provide a high time resolution as well as the detection
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::548b32cd669bf3b8b07c4a01e5e259ee
https://doi.org/10.1016/s0924-4247(01)00873-1
https://doi.org/10.1016/s0924-4247(01)00873-1
Publikováno v:
Sensors and Actuators B: Chemical. 78:119-125
A new method for the preparation of sputtered MoO 3 multilayer thin films for the application in gas sensors has been developed. A remarkable change of the crystallinity and the microstructure compared to the whisker-like structure of conventionally
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ba1586995d18ffe51560453c340c9f70
https://doi.org/10.1016/s0925-4005(01)00801-2
https://doi.org/10.1016/s0925-4005(01)00801-2
Publikováno v:
Sensors and Actuators B: Chemical. 78:106-112
Metal oxide gas sensors using In 2 O 3 are able to detect low concentrations of NO 2 . The gas sensitive properties of In 2 O 3 can be improved by adding catalysts or promoters. In the present work, the surface modification of reactively RF-sputtered
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6b668d9e48104490f6d983a5a74274ee
https://doi.org/10.1016/s0925-4005(01)00799-7
https://doi.org/10.1016/s0925-4005(01)00799-7
Publikováno v:
Sensors and Actuators B: Chemical. 78:216-220
A new heated microgas-sensor with only 80 μm ×80 μm active heater area and excellent long-term stability is presented. Using a previously presented SiC based microhotplate and depositing an In 2 O 3 thin film layer on top of the interdigital elect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d2b4fc4b0c7029c2ab2361061762b03a
https://doi.org/10.1016/s0925-4005(01)00815-2
https://doi.org/10.1016/s0925-4005(01)00815-2
Publikováno v:
Sensors and Actuators B: Chemical. 77:111-115
A new SiC-based heated micro gas sensor with a 100 μm ×100 μm heated membrane and excellent heater long-term stability is presented. Combining a previously presented micro hotplate with new gas sensitive (2 1 1) oriented In 2 O 3 thin film layers
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::95490521567f2de9c41a8b2f7de99301
https://doi.org/10.1016/s0925-4005(01)00681-5
https://doi.org/10.1016/s0925-4005(01)00681-5