Zobrazeno 1 - 3
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pro vyhledávání: '"H. N. Slingerland"'
Publikováno v:
Microelectronic Engineering. 5:155-161
The ‘Ion Beam Pattern Generator’ project started in 1983 at the research group Particle Optics of the Technical University Delft. The main goal is to increase the throughput of Focused Ion Beam machines. An increase of more than one order of magn
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fe1f6f40a2d098e01f36773cfad73478
https://doi.org/10.1016/0167-9317(86)90042-0
https://doi.org/10.1016/0167-9317(86)90042-0
Publikováno v:
Microelectronic Engineering. 7:61-89
A mass filter has been developed for use in the Delft ion beam pattern generator. The filter is made achromatic by proper combination of a magnetic and an electric field. It is capable of separating ions in the mass range 1H to 209Bi. The induction o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::61b4a15c32366c84d89a8f4b72c5e4a3
https://doi.org/10.1016/0167-9317(87)90006-2
https://doi.org/10.1016/0167-9317(87)90006-2
Autor:
H. N. Slingerland
Publikováno v:
Microelectronic Engineering. 2:219-226
Focused ion-beam systems often use a Liquid Metal Ion Source (LMIS). These sources exhibit a high brightness, small size and an energy spread in the order of 10 eV. Therefore an instrument using such a source can be chromatically limited. Optimizing
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::faba039ba9cceac337f70ebfddb960ed
https://doi.org/10.1016/0167-9317(84)90002-9
https://doi.org/10.1016/0167-9317(84)90002-9