Zobrazeno 1 - 10
of 79
pro vyhledávání: '"H. Lüthje"'
Publikováno v:
Microsystem Technologies. 10:237-240
Soft magnetic yokes, cores, and poles, as well as permanent magnets are the potential magnetic components of an electromagnetic microactuator system. Depending on the requirements of the actuator, soft magnetic materials, hard magnetic materials or a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::036f1361435b3a7809e9d69d81c670d9
https://doi.org/10.1007/s00542-003-0352-5
https://doi.org/10.1007/s00542-003-0352-5
Publikováno v:
Microelectronic Engineering. 11:255-258
A RIE technique for the fabrication of sub-0.5 μm W absorber patterns has been developed based on a SF 6 /CH 3 /Ar gas system. Upon extensive optimization of particularly CHF 3 content and bias voltage precise pattern with vertical profiles can be e
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9abd094702176f6ece91a78a757675e1
https://doi.org/10.1016/0167-9317(90)90109-7
https://doi.org/10.1016/0167-9317(90)90109-7
Diamond is intensively under discussion as membrane material for X-ray masks. Its high optical transparency and its high thermal conductivity, its very low thermal expansion coefficient and its high Young's modulus favours diamond over other material
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c3ef20e1f18468c3fc2729e3ba5f28a4
https://publica.fraunhofer.de/handle/publica/181161
https://publica.fraunhofer.de/handle/publica/181161
Publikováno v:
Microsystem Technologies; Nov2008, Vol. 14 Issue 12, p1949-1954, 6p
Autor:
R. Küster, R. Bandorf, C. Henke, H. Lüthje, J.-H. Sick, C. Neumeister, A. Phataralaoha, S. Büttgenbach, H. Gatzen, G. Bräuer
Publikováno v:
Microsystem Technologies; Jun2006, Vol. 12 Issue 7, p680-684, 5p
Autor:
R. Bandorf, H. Lüthje, K. Schiffmann, M. Beck, H.-H. Gatzen, M. Schmidt, S. Büttgenbach, G. Bräuer
Publikováno v:
Microsystem Technologies; Mar2004, Vol. 10 Issue 3, p223-226, 4p
Publikováno v:
Microsystem Technologies; Mar2004, Vol. 10 Issue 3, p237-240, 4p
Autor:
H. Lüthje, Uwe Mackens, Pierre H. Woerlee, A.J. Walker, Ulrich Mescheder, F. Mund, Casper A. H. Juffermans, H. Lifka
Publikováno v:
Microelectronic Engineering. 9:89-92
SiC/Au masks have been used for the fabrication of half-micron devices by SOR-based X-ray lithography. To meet the high demands on overlay accuracy we have used rigid SiC-membranes combined with a stress reduced Au-absorber for X-ray mask fabrication
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1e53d8d7620b176ef97f8be76057abe0
https://doi.org/10.1016/0167-9317(89)90020-8
https://doi.org/10.1016/0167-9317(89)90020-8
Publikováno v:
Journal of Vacuum Science and Technology. 13:976-980
We have investigated how the sputter yield and the shrinkage of masking structures depend on the angle of incidence of the bombarding ions. In numerous cases, suitable mask materials can be used in the preparation of deep structures with high lateral
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3b19193ba01962376760c40b75aa572c
https://doi.org/10.1116/1.569033
https://doi.org/10.1116/1.569033
Autor:
H. Lüthje
Publikováno v:
Okayama Igakkai Zasshi (Journal of Okayama Medical Association). 21:272-281
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::46adbe28a1d96355972f4dd459929c60
https://doi.org/10.4044/joma1889.21.231_272
https://doi.org/10.4044/joma1889.21.231_272