Zobrazeno 1 - 2
of 2
pro vyhledávání: '"H. F. Hillery"'
Autor:
H. A. Six, C. D. Wagner, T. G. Kinisky, H. F. Hillery, D. E. Passoja, J. A. Taylor, W. T. Jansen
Publikováno v:
Journal of Vacuum Science and Technology. 21:933-944
Silicon–oxygen and aluminum–oxygen compounds exhibit significant XPS Auger and photoelectron chemical shifts that are accurately measurable. Chemical state plots of KLL Auger kinetic energy versus 2p photoelectron energy permit identification of
Publikováno v:
Journal of Crystal Growth. 58:44-52
Silicon on sapphire wafers having visual haze ratings from 1–8 have been characterized by using a variety of techniques, including X-ray rocking curve analysis, X-ray orientation measurements, lattice parameter determination, resistivity measuremen