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pro vyhledávání: '"H. E. Unalan"'
Autor:
S. Santra, S. Z. Ali, P. K. Guha, P. Hiralal, H. E. Unalan, S. H. Dalal, J. A. Covington, W. I. Milne, J. W. Gardner, F. Udrea, Matteo Pardo, Giorgio Sberveglieri
Publikováno v:
AIP Conference Proceedings.
This paper reports on the utilization of zinc oxide nanowires (ZnO NWs) on a silicon on insulator (SOI) CMOS micro‐hotplate for use as an alcohol sensor. The device was designed in Cadence and fabricated in a 1.0 μm SOI CMOS process at XFAB (Germa