A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing

Autor: M. Chefdeville, Sander M. Smits, Jurriaan Schmitz, D. Altpeter, Cora Salm, Antonius A.I. Aarnink, J. Timmermans, V.M. Blanco Carballo, Jan Visschers, H. Der Graaf

Publikováno v: Proceedings of 32nd European Solid State Device Research Conference, 129-132
STARTPAGE=129;ENDPAGE=132;TITLE=Proceedings of 32nd European Solid State Device Research Conference

This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for ionizing radiation. Its application ranges from particle detection in nuclear and high-energy phys

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8686c4e8cdad0d24b874f20bbacca160
https://doi.org/10.1109/essder.2006.307655