Zobrazeno 1 - 1
of 1
pro vyhledávání: '"H. D. Nusbaum"'
Publikováno v:
Optical Society of America Annual Meeting.
Modulated-dc-magnetron sputtering offers a novel solution to problems associated with arcing on the surface of the sputtering target. Arcing has been identified as a main contributor to defects in thin films produced with low-pressure reactive magnet
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::63615218e00adad1a8817f127009c1bc
https://doi.org/10.1364/oam.1992.fh4
https://doi.org/10.1364/oam.1992.fh4
