Zobrazeno 1 - 2
of 2
pro vyhledávání: '"H. B. Bonham"'
Autor:
H. B. Bonham, P. V. Plunkett
Publikováno v:
Surface Contamination ISBN: 9781468435085
Many authors have discussed the detrimental results of surface contamination upon thermocompression bondability. The problem is acute when gold-aluminum intraconnections are formed, since most wet chemical cleaning procedures degrade bondability furt
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d2a878ea450e41f3d1d455a9dac51a21
https://doi.org/10.1007/978-1-4684-3506-1_18
https://doi.org/10.1007/978-1-4684-3506-1_18
Autor:
N. T. Panousis, H. B. Bonham
Publikováno v:
11th Reliability Physics Symposium.
Thermocompression bondability in the tantalum nitride-chromium-goald metallization system is degraded because of diffusion and oxidation of chromiium resulting from a 300°C 2-hour air bake used to stabilize the tantalum nitride resistor network. Bon