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Plasma deposition of hydrogenated diamond like carbon films from CH4-Ar mixtures

Autor: A.M. Losacco, P. Bruno, G Mattei, G. Cicala

Publikováno v: European Mat. Res. Soc. Spring Meeting (E-MRS 2003) Symposium G Protective coatings and thin films-03 G/PI.40 p. G-7, June 2003, Strasbourg (France)., 2003
info:cnr-pdr/source/autori:G. Cicala, P. Bruno, A. M. Losacco and G. Mattei/congresso_nome:European Mat. Res. Soc. Spring Meeting (E-MRS 2003) Symposium G Protective coatings and thin films-03 G%2FPI.40 p. G-7, June 2003/congresso_luogo:Strasbourg (France)./congresso_data:2003/anno:2003/pagina_da:/pagina_a:/intervallo_pagine
Surface & coatings technology 180 (2004): 222–226. doi:10.1016/j.surfcoat.2003.10.044
info:cnr-pdr/source/autori:G. Cicala; P. Bruno; A.M.Losacco; G.Mattei/titolo:Plasma deposition of hydrogenated diamond like carbon films from CH4-Ar mixtures/doi:10.1016%2Fj.surfcoat.2003.10.044/rivista:Surface & coatings technology/anno:2004/pagina_da:222/pagina_a:226/intervallo_pagine:222–226/volume:180

Hydrogenated diamond-like carbon coatings have been deposited from CH 4 radiofrequency plasmas. The effect of the argon addition to the precursor CH 4 gas has been investigated. The argon dilution has been found to influence the plasma phase and the

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c4701ba2ddb308542409d4854ad65036
https://publications.cnr.it/doc/114497