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Fabrication of probe tips via the FIB method for nanodiagnostics of the surface of solids by atomic force microscopy

Autor: D J Rodriguez, A V Kotosonova, H A Ballouk, N A Shandyba, O I Osotova, A S Kolomiytsev

Publikováno v: Journal of Physics: Conference Series. 2086:012204

In this work, we carried out an investigation of commercial atomic force microscope (AFM) probes for contact and semi-contact modes, which were modified by focused ion beam (FIB). This method was used to modify the original tip shape of silicon AFM p

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::be84156cc0ab3c4303289b300701d8c1
https://doi.org/10.1088/1742-6596/2086/1/012204

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