Výsledky vyhledávání - "Hélène LECOQ"

Electrical and ion beam analyses of Yttrium and Yttrium-Titanium getter thin films oxidation

Autor: Alain Bosseboeuf, Charlotte Kutyla, Olivier Wendling, Hélène Lecoq, Philippe Coste, S. Escoubas, Piyush Jagtap, Aurélien Bellamy, C. Guichet, Sylvain Lemettre, Clement Bessouet, Olivier Thomas, Thierry Sauvage, Johan Moulin

Publikováno v: Journal of Vacuum Science and Technology A
Journal of Vacuum Science and Technology A, 2021
Journal of Vacuum Science & Technology A
Journal of Vacuum Science & Technology A, 2021

International audience; Yttrium, Titanium and Yttrium-Titanium getter thin films were elaborated on silicon by co-evaporation in ultra-high vacuum. Y-Ti films exhibit nanometric crystallites size (18-35 nm) leading to a very high grain boundary densi

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d55a904dc048de59b68c1bd2a34728c8
https://hal.archives-ouvertes.fr/hal-03398744

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In-Situ Electrical Characterization of Low Temperature Getter Thin Films Activation

Autor: Thierry Sauvage, Alain Bosseboeuf, Clement Bessouet, Johan Moulin, Hélène Lecoq, Sylvain Lemettre, Philippe Coste

Publikováno v: ECS Transactions. 86:47-53

Thanks to their reactivity to gases, getter materials are involved in vacuum packaging to compensate leaks and permeation through the package. After deposition, the material is passivated due to the contact with the air, and must be thermally activat

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::75f734c5f89af2a5b642d5b6c4800233
https://doi.org/10.1149/08616.0047ecst

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Erratum: 'Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation' [J. Vac. Sci. Technol. B 39, 054202 (2021)]

Autor: P. Coste, Piyush Jagtap, Christophe Guichet, Olivier Thomas, J. Moulin, Hélène Lecoq, S. Escoubas, Thierry Sauvage, Alain Bosseboeuf, Olivier Wendling, Clément Bessouet, Charlotte Kutyla, Aurélien Bellamy, Sylvain Lemettre

Publikováno v: Journal of Vacuum Science & Technology B. 39:067001

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::13b08738600af17b7da64e6152f96d25
https://doi.org/10.1116/6.0001458

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In situ electrical characterization of YxTiy getter thin films during thermal activation

Autor: Alain Bosseboeuf, Thierry Sauvage, P. Coste, Hélène Lecoq, Ch Renard, J. Moulin, Sylvain Lemettre, Clément Bessouet

Publikováno v: Journal of Physics: Conference Series
Journal of Physics: Conference Series, IOP Publishing, 2019, 1319, pp.012012. ⟨10.1088/1742-6596/1319/1/012012⟩

Transition metals alloys are the most studied getter films for wafer-level vacuum packaging of MEMS. In this work we investigated yttrium and YxTiy alloys films that could possibly overcome the limitations of usual getter materials, i.e. reversible s

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d090861cea51b1d682fde133fc52fc70
https://hal.archives-ouvertes.fr/hal-02343334/document

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Corrigendum to 'Helium apparent diffusion coefficient and trapping mechanisms in implanted B4C boron carbide' [J. Nucl. Mater. 517 (2019) 165–174]

Autor: Aurélien Jankowiak, Thierry Sauvage, Dominique Gosset, Nicolas Lochet, Hélène Lecoq, Vianney Motte, Nathalie Moncoffre, Nicolas Pradeilles

Publikováno v: Journal of Nuclear Materials
Journal of Nuclear Materials, Elsevier, 2019, 521, pp.245. ⟨10.1016/j.jnucmat.2019.05.011⟩
Journal of Nuclear Materials, 2019, 521, pp.245. ⟨10.1016/j.jnucmat.2019.05.011⟩

International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4a92a46bc225e0e565c7fa7e53dd86d0
https://hal-unilim.archives-ouvertes.fr/hal-02489067

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Characterization of the activation of yttrium-based getter films by electrical measurements and ion-beam analyses

Autor: Thierry Sauvage, Clement Bessouet, P. Coste, Alain Bosseboeuf, Hélène Lecoq, Sylvain Lemettre, Johan Moulin

Publikováno v: 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)
2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France. ⟨10.1109/DTIP.2019.8752932⟩

International audience; Gettering properties of thin films of pure yttrium and yttrium-based alloys have been studied for application to MEMS vacuum packaging at the wafer level. Thin films of Y, Zr-Y, Ti-Y and V-Y were co-evaporated under ultra-high

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9e4c4f6d4bf68976923456f58a0bfaca
https://hal.archives-ouvertes.fr/hal-02343431/document

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Investigation of the densification mechanisms and corrosion resistance of amorphous silica films

Autor: Hugues Vergnes, Vincent Rouessac, Brigitte Caussat, Constantin Vahlas, Simon Ponton, Franck Dhainaut, Daniel Sadowski, Hélène Lecoq, Diane Samélor, Thierry Sauvage

Publikováno v: Journal of Non-Crystalline Solids
Journal of Non-Crystalline Solids, Elsevier, 2019, 515, pp.34-41. ⟨10.1016/j.jnoncrysol.2019.04.005⟩
Journal of Non-Crystalline Solids, Elsevier, 2019, ⟨10.1016/j.jnoncrysol.2019.04.005⟩

International audience; The barrier properties of the technologically attractive amorphous silica films depend on their structural characteristics at the atomic level, which, in turn are strongly influenced by the deposition conditions. In this paper

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f1e7084dc08c2754cfd7e244632c0a37
https://hal.archives-ouvertes.fr/hal-02134716/document

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