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Autor:
Thad B. Parry, Darryl Weddington, Suresh Chandrasekaran, Monte M. Nettles, Shin Hwee Tey, Oliver H. Eagle, Vikram V. Iyengar
Publikováno v:
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
In this paper, the observation of active area line collapse in 20 nm planar NAND Flash technology is reported. The mechanism of active area pattern collapse is described using the theory of capillary forces. The proposed model for pattern collapse is
Autor:
H. Eagle
Publikováno v:
Annals of the New York Academy of Sciences. 130:312-316
Autor:
Srivardhan Gowda, Art B. Reyes, Oliver H. Eagle, Srivatsan Venkatesan, Vikram V. Iyengar, Suresh Chandrasekaran
Publikováno v:
2014 IEEE Workshop On Microelectronics And Electron Devices (WMED).
In this paper, the effect of Shallow Trench Isolation (STI) degradation on program disturb is studied. It is reported that trench isolation is compromised with non-uniformity in trench depth leading to increased boost loss through field isolation lea
Publikováno v:
Antibioticschemotherapy (Northfield, Ill.). 2(11)
Publikováno v:
Federation proceedings. 5(1 Pt 2)
Publikováno v:
The Journal of venereal disease information. 27
Publikováno v:
The Journal of clinical investigation. 25(4)
Autor:
H, EAGLE
Publikováno v:
Transactionsstudies of the College of Physicians of Philadelphia. 14
Autor:
H, EAGLE
Publikováno v:
The Journal of pharmacology and experimental therapeutics. 85