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pro vyhledávání: '"Gyengseop Kim"'
Autor:
Kyoil Koo, Gyengseop Kim, Jung-Dal Choi, Seung-Hune Yang, Ho-Kyu Kang, Sang-hun Kim, Sooryong Lee, Young-Chang Kim
Publikováno v:
SPIE Proceedings.
Most important factors in OPC model building will be sampling data for model calibration. We will demonstrate that how CD-AFM data can be used in OPC modeling and will show possibility to get a more predictive model by using CD-AFM data.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::427a18453ed61489b4f54e28303d7c7c
https://doi.org/10.1117/12.2025552
https://doi.org/10.1117/12.2025552
