Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Gwo-Yuh Shiau"'
Publikováno v:
Journal of Applied Polymer Science. 45:103-109
Barbituric acid (BTA) was used as an initiator for the homopolymerization of bismaleimide (BMI). The reaction was controlled by the amount of barbituric acid and ended up with solvent-soluble oligomers. The effects of varying the amounts of BTA, as w
Publikováno v:
Journal of Applied Polymer Science. 44:467-476
Barbituric acid (BTA) has a novel influence on glass transition temperature (Tg) of bismaleimide (BMI)–epoxy resin systems. It causes the Tg of a BMI–epoxy resin system to rise significantly. The BTA's influence on Tg was investigated by changing
Publikováno v:
SPIE Proceedings.
The lithography processes for the metal layers of stacked DRAM have normally been considered as one of the most important steps to determine the chip yield performance. The severe topography step-height on the metal resist processes normally leads to
Autor:
Daniel Hao-Tien Lee, Gwo-Yuh Shiau
Publikováno v:
SPIE Proceedings.
The stacked cell design of DRAM processes for lithography considerations has suffered severe topography step-height and unsmooth surface issues. In addition, the stability and uniformity control of thin film processes on the backend process can affec
Publikováno v:
SPIE Proceedings.
The striation problem on 8' topographical wafers is reported. The striation on topographical wafers is not observed on planar wafers. The degree of striation increases with topographical step-height for the traditional photoresist dispense method. In
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Akademický článek
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