Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Gwen Hummel"'
Publikováno v:
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS).
Contour mode resonators in suspended AlN films experience performance limitations from anchors and bussing. To mitigate this, we show how confocal acoustical resonators designed with tailored electrode shapes increase quality factor by concentrating
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0054e0b04bf5a9861c9b71c2ce7d940a
https://doi.org/10.1109/mems51782.2021.9375322
https://doi.org/10.1109/mems51782.2021.9375322
