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pro vyhledávání: '"Guoxiong Song"'
Publikováno v:
Micromachines, Vol 11, Iss 5, p 472 (2020)
Capacitive micromechanical resonators share electrodes with the same bias voltage, resulting in the occurrence of electrostatic coupling between intrinsic modes. Unlike the traditional mechanical coupling, the electrostatic coupling is determined by
Externí odkaz:
https://doaj.org/article/a0dd02662ec743b797ccc2cdcb20e67a
Publikováno v:
SSRN Electronic Journal.
Publikováno v:
Micromachines
Volume 11
Issue 5
Micromachines, Vol 11, Iss 472, p 472 (2020)
Volume 11
Issue 5
Micromachines, Vol 11, Iss 472, p 472 (2020)
Capacitive micromechanical resonators share electrodes with the same bias voltage, resulting in the occurrence of electrostatic coupling between intrinsic modes. Unlike the traditional mechanical coupling, the electrostatic coupling is determined by
Publikováno v:
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).
This paper reports a new method of calibration and compensation for the misalignment angle between the pickoff axis and the forcing directions of the disk resonator gyroscopes. With this error eliminated, the driving control loop will be free of the