Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Guo Xiang Ning"'
Publikováno v:
SPIE Proceedings.
Historical data indicates reticle write times are increasing node-to-node. The cost of mask sets is increasing driven by the tighter requirements and more levels. The regular introduction of new generations of mask patterning tools with improved perf
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1d2bb43e933e6a1df1381411b6ce6755
https://doi.org/10.1117/12.2076771
https://doi.org/10.1117/12.2076771
Autor:
Piyush Verma, Keith Standiford, Robert C. Pack, Akira Fujimura, Todd P. Lukanc, Gek Soon Chua, Linyong Pang, Fadi Batarseh, Guo Xiang Ning
Publikováno v:
SPIE Proceedings.
A methodology is described wherein a calibrated model-based ‘Virtual’ Variable Shaped Beam (VSB) mask writer process simulator is used to accurately verify complex Optical Proximity Correction (OPC) and Inverse Lithography Technology (ILT) mask d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0fc60b9b700de6cf13dff6ab6b63ad07
https://doi.org/10.1117/12.2069613
https://doi.org/10.1117/12.2069613