Characterization of electrical linewidth test structures patterned in [100] silicon-on-insulator for use as CD standards.

Autor: Cresswell, M.W., Allen, R.A., Ghoshtagore, R.N., Guillaume, N.M.P., Shea, P.J., Everist, S.C., Linholm, L.W.

Publikováno v: ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095); 2000, p3-9, 7p

Extraction of sheet resistance from four-terminal sheet resistors replicated in monocrystalline films with non-planar geometries.

Autor: Cresswell, M.W., Guillaume, N.M.P., Allen, R.A., Guthrie, W.F., Ghoshtagore, R.N., Owen, J.C. III., Osborne, Z., Sullivan, N., Linholm, L.W.

Publikováno v: ICMTS 1998 Proceedings of 1998 International Conference on Microelectronic Test Structures (Cat No98CH36157); 1998, p29-38, 10p

Tento výsledek nelze pro nepřihlášené uživatele zobrazit.
K zobrazení výsledku je třeba se přihlásit.