Zobrazeno 1 - 10
of 269
pro vyhledávání: '"Guerrero, Douglas"'
Autor:
Guerrero, Douglas, Amblard, Gilles R., Baek, Seungjoo, Heo, Seonggil, Vandereyken, Jelle, Suh, Hyo Seon, Caron, Elke, Santos, Andreia, Harumoto, Masahiko, Guerrero, Douglas J.
Publikováno v:
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129572G-129572G-7, 1166156p
Understanding and improving performance of 14-nm HP EUV lithography via rational design of materials
Autor:
Guerrero, Douglas, Amblard, Gilles R., Li, Si, Sweat, Daniel, Lu, Xinlin, Brakensiek, Kelsey, Lu, Pengtao, Lowes, Joyce, Van Driessche, Veerle, Guerrero, Douglas J.
Publikováno v:
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129571T-129571T-8, 1166148p
Autor:
Guerrero, Douglas, Amblard, Gilles R., Yamamoto, Hiroki, Tsutsui Ito, Yuko, Okamoto, Kazumasa, Kozawa, Takahiro
Publikováno v:
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129572F-129572F-7, 1166156p
Autor:
Guerrero, Douglas, Amblard, Gilles R., LaBeaume, P., Hernandez, K., Vitaku, E., Marangoni, T., Aqad, E., Li, M., Hoelzel, C., Lachowski, J., Hayes, M., Wong, S., Li, J., Kwok, A., Huang, W., Park, J., He, H., Mackay, H., Liu, C., Cameron, J., Xu, C., Xie, Q., Petrillo, K.
Publikováno v:
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129572B-129572B-6, 1166155p
Publikováno v:
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129572E-129572E-7, 1166156p
Autor:
Guerrero, Douglas, Amblard, Gilles R., Cen, Yinjie, Aqad, Emad, Cui, Li, Coley, Suzanne M., Park, Jong Keun, Naab-Rafael, Benjamin D., Rena, Rochelle, Paul, Tyler, Eckert, Sylvie, Wu, Chunyi, Finch, Mike, Behnke, Jason, Lee, ChoongBong, Petrillo, Karen
Publikováno v:
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129571Z-129571Z-8, 1166148p
Autor:
Guerrero, Douglas, Amblard, Gilles R., Le, Dan N., Chu, Thi Thu Huong, Kim, Jin-Hyun, Veyan, Jean-Francois, Lee, Won-Il, Tiwale, Nikhil, Lee, Minjong, Choi, Seungsoo, Woo, Jihoon, Nam, Chang-Yong, Choi, Rino, Kim, Jiyoung
Publikováno v:
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129570B-129570B-7, 1166138p
Autor:
Guerrero, Douglas, Amblard, Gilles R., Cen, Yinjie, Park, Jong Keun, Coley, Suzanne M., Naab-Rafael, Benjamin D., Cui, Li, Aqad, Emad, Alexandrescu, Stefan, Rena, Rochelle, Eckert, Sylvie, Behnke, Jason, Lee, ChoongBong, Petrillo, Karen
Publikováno v:
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129570A-129570A-7, 1166138p
Autor:
Guerrero, Douglas, Amblard, Gilles R., Kim, Gayoung, Ku, Yejin, Lee, Jin-Kyun, Kim, Jiho, Park, Byeong-Gyu, Lee, Sangsul, Jang, Yu Ha, Jung, Byung Jun, Koh, Chawon, Nishi, Tsunehiro, Kim, Hyun-Woo
Publikováno v:
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129571X-129571X-6, 1166146p