Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Guangqing Meng"'
Autor:
Wen H. Ko, Guangqing Meng
Publikováno v:
Sensors and Actuators A: Physical. 75:45-52
This article describes the power series solution to the model of circular diaphragm deflection under uniform load. The parameters for touch mode operation, such as touch point pressure and touch radius, are defined and computed by the algorithm propo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f0db23aa0a26e844064cc77d2a0086aa
https://doi.org/10.1016/s0924-4247(99)00055-2
https://doi.org/10.1016/s0924-4247(99)00055-2
Publikováno v:
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090); 2001, p166-169, 4p
Publikováno v:
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).
This paper reports the development of a family of ultrasensitive and ultra-high-vacuum absolute capacitive pressure sensors, fabricated using the dissolved wafer process technology (DWP). One type of the sensors offers the following characteristics:
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::01f59703cf0819697b77a2064764fa77
https://doi.org/10.1109/memsys.2001.906506
https://doi.org/10.1109/memsys.2001.906506
Publikováno v:
Chinese Physics Letters; Aug1995, Vol. 12 Issue 8, p1-1, 1p
Publikováno v:
2014 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP); 2014, p1-5, 5p