Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Guang‐Huan Feng"'
Autor:
Mei‐Chieh Yu, Cheng‐Che Tsai, Cheng‐Shong Hong, Yuan‐Xin Zhang, Guang‐Huan Feng, Sheng‐Yuan Chu
Publikováno v:
Journal of the American Ceramic Society. 106:1037-1049
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d6bb6c0557d9be060df2f5ddcfa1c7ca
https://doi.org/10.1111/jace.18785
https://doi.org/10.1111/jace.18785
Autor:
Guang-Huan Feng, Cheng-Ying Li, Yueh-Han Chen, Yi-Chen Ho, Sheng-Yuan Chu, Cheng-Che Tsai, Cheng-Shong Hong
Publikováno v:
ECS Journal of Solid State Science and Technology. 11:123005
In this study, AlN-based films are deposited using a sputtering deposition method, and Mo dopants with different concentrations are added in the proposed system by controlling the sputtering power in order to improve the crystallinity and piezoelectr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7e47835fc02ed3de819b034298fe5268
https://doi.org/10.1149/2162-8777/aca796
https://doi.org/10.1149/2162-8777/aca796