Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Guang‐Huan Feng"'
Autor:
Mei‐Chieh Yu, Cheng‐Che Tsai, Cheng‐Shong Hong, Yuan‐Xin Zhang, Guang‐Huan Feng, Sheng‐Yuan Chu
Publikováno v:
Journal of the American Ceramic Society. 106:1037-1049
Autor:
Guang-Huan Feng, Cheng-Ying Li, Yueh-Han Chen, Yi-Chen Ho, Sheng-Yuan Chu, Cheng-Che Tsai, Cheng-Shong Hong
Publikováno v:
ECS Journal of Solid State Science and Technology. 11:123005
In this study, AlN-based films are deposited using a sputtering deposition method, and Mo dopants with different concentrations are added in the proposed system by controlling the sputtering power in order to improve the crystallinity and piezoelectr
Autor:
Yu, Mei‐Chieh1 (AUTHOR), Tsai, Cheng‐Che2 (AUTHOR) jertsai@seed.net.tw, Hong, Cheng‐Shong3 (AUTHOR), Zhang, Yuan‐Xin1 (AUTHOR), Feng, Guang‐Huan1 (AUTHOR), Chu, Sheng‐Yuan1 (AUTHOR) chusy@mail.ncku.edu.tw
Publikováno v:
Journal of the American Ceramic Society. Feb2023, Vol. 106 Issue 2, p1037-1049. 13p. 1 Black and White Photograph, 2 Charts, 15 Graphs.