Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Gu, Minsun"'
Publikováno v:
Current Applied Physics 53, 46 (2023)
Soaring demands of multi-stacked memory devices request urgent development of backside contact electrode technologies, such as high aspect ratio etching, metallization, and inspection methods. Especially the complex metal contact process should be mo
Externí odkaz:
http://arxiv.org/abs/2310.14212
Autor:
Khim, Yeong Gwang, Park, Beomjin, Heo, Jin Eun, Khim, Young Hun, Khim, Young Rok, Gu, Minsun, Rhee, Tae Gyu, Chang, Seo Hyoung, Han, Moonsup, Chang, Young Jun
Publikováno v:
Journal of the Korean Physical Society 82, 486 (2023)
Titanium nitride (TiN) presents superior electrical conductivity with mechanical and chemical stability and compatibility with the semiconductor fabrication process. Here, we fabricated epitaxial and polycrystalline TiN (111) thin films on MgO (111),
Externí odkaz:
http://arxiv.org/abs/2310.14208