Zobrazeno 1 - 10
of 21
pro vyhledávání: '"Groves, T. R."'
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2003, Vol. 21 Issue 6, p2834-2838, 5p
Autor:
Pickard, D. S., Campbell, C., Crane, T., Cruz-Rivera, L. J., Davenport, A., Meisburger, W. D., Pease, R. F. W., Groves, T. R.
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2002, Vol. 20 Issue 6, p2662-2665, 4p
Autor:
Rafferty, B., Groves, T. R.
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2001, Vol. 19 Issue 6, p2607-2611, 5p
Autor:
Groves, T. R.
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1999, Vol. 17 Issue 6, p2808-2813, 6p
Autor:
Pfeiffer, H. C., Dhaliwal, R. S., Golladay, S. D., Doran, S. K., Gordon, M. S., Groves, T. R., Kendall, R. A., Lieberman, J. E., Petric, P. F., Pinckney, D. J., Quickle, R. J., Robinson, C. F., Rockrohr, J. D., Senesi, J. J., Stickel, W., Tressler, E. V., Tanimoto, A., Yamaguchi, T., Okamoto, K., Suzuki, K.
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1999, Vol. 17 Issue 6, p2840-2846, 7p
Autor:
Hartley, J. G., Groves, T. R.
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1999, Vol. 17 Issue 6, p2932-2935, 4p
Autor:
Sturans, M. A., Hartley, J. G., Pfeiffer, H. C., Dhaliwal, R. S., Groves, T. R., Pavick, J. W., Quickle, R. J., Clement, C. S., Dick, G. J., Enichen, W. A., Gordon, M. S., Kendall, R. A., Kostek, C. A., Pinckney, D. J., Robinson, C. F., Rockrohr, J. D., Safran, J. M., Senesi, J. J., Tressler, E. V.
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1998, Vol. 16 Issue 6, p3164-3167, 4p
Distributed, multiple variable shaped electron beam column for high throughput maskless lithography.
Autor:
Groves, T. R., Kendall, R. A.
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1998, Vol. 16 Issue 6, p3168-3173, 6p
Autor:
Groves, T. R.
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1996, Vol. 14 Issue 6, p3839-3844, 6p
Autor:
Butsch, R., Enichen, W. A., Gordon, M. S., Groves, T. R., Hartley, J. G., Pavick, J. W., Pfeiffer, H. C., Quickle, R. J., Rockrohr, J. D., Stickel, W.
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1995, Vol. 13 Issue 6, p2478-2482, 5p