Dynamic behavior in self-assembly process of cylindrical phase PS-b-PMMA block copolymer

Autor: Loucif Seiad, M., MKuppuswamy, V.K., Cao, Y., Gronheid, R., Ferhat, M.

Publikováno v: In Materials Science in Semiconductor Processing 1 August 2017 66:26-32

Design method and algorithms for directed self-assembly aware via layout decomposition in sub-7 nm circuits

Autor: Karageorgos, I. Ryckaert, J. Gronheid, R. Tung, M.C. Wong, H.-S.P. Karageorgos, E. Croes, K. Bekaert, J. Vandenberghe, G. Stucchi, M. Dehaene, W.

Major advancements in the directed self-assembly (DSA) of block copolymers have shown the technique's strong potential for via layer patterning in advanced technology nodes. Molecular scale pattern precision along with low cost processing promotes DS

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od______2127::d4538cd772ce28238813592e94d0ec7f
https://pergamos.lib.uoa.gr/uoa/dl/object/uoadl:3035842

Optical imaging metrology calibration using high voltage scanning electron microscope at after-development inspection for advanced processes

Autor: Adan, Ofer, Robinson, John C., Gutman, N., Tarshish, I., Gronheid, R., Dror, C., Michelsson, D., Backhauss, H., Levin, L., Levinski, V., Paskover, Y., Yerushalmi, L., Heidrich, T., Czerkas, S., Pohlmann, U., Laske, F.

Publikováno v: Proceedings of SPIE; March 2020, Vol. 11325 Issue: 1 p113251X-113251X-7, 1019267p

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Influence of Homopolymer Addition in Templated Assembly of Cylindrical Block Copolymers.

Autor: Doise J; Department of Electrical Engineering (ESAT) , KU Leuven , Kasteelpark Arenberg 10 , B-3001 Heverlee , Belgium.; imec , Kapeldreef 75 , B-3001 Heverlee , Belgium., Bezik C; Institute for Molecular Engineering , University of Chicago , 5747 South Ellis Avenue , Chicago , Illinois 60637 , United States., Hori M; JSR Micro N.V. , Technologielaan 8 , B-3001 Leuven , Belgium., de Pablo JJ; Institute for Molecular Engineering , University of Chicago , 5747 South Ellis Avenue , Chicago , Illinois 60637 , United States., Gronheid R; imec , Kapeldreef 75 , B-3001 Heverlee , Belgium.

Publikováno v: ACS nano [ACS Nano] 2019 Apr 23; Vol. 13 (4), pp. 4073-4082. Date of Electronic Publication: 2019 Mar 21.