Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Grigory L. Gorbulin"'
Publikováno v:
Physica B: Condensed Matter. 325:394-400
An investigation of the influence of substrate temperature on optoelectronic properties and microstructure of a-SiGe:H films fabricated by low frequency 55 kHz PECVD method was carried out. It was found that the decrease of substrate temperature lead
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1cd6078f154b455dbda6b424f1849731
https://doi.org/10.1016/s0921-4526(02)01692-7
https://doi.org/10.1016/s0921-4526(02)01692-7
Publikováno v:
Journal of Non-Crystalline Solids. 297:205-209
The optoelectronic properties and microstructure of a-SiGe:H films deposited by 55 kHz plasma enhanced chemical vapor deposition (PECVD) method were investigated. The growth rate of a-SiGe:H deposited by this method is larger in comparison to the com
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6559692196cd8ce0bddc3a50807ff39f
https://doi.org/10.1016/s0022-3093(01)00928-0
https://doi.org/10.1016/s0022-3093(01)00928-0
Publikováno v:
Materials for Infrared Detectors II.
The results of the investigation of the properties of a-SiGe:H/c-Si heterostructures fabricated by LF (55 kHz) PECVD are presented. The investigation of spectral characteristics of a-SiGe:H/c-Si heterostructure in the wavelength range from 500 to 110
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::52869834a32f0dd0b4d9ac4793112e0b
https://doi.org/10.1117/12.451912
https://doi.org/10.1117/12.451912