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Autor:
Jesus J. Alcantar-Peña, Maria J. Arellano-Jimenez, D. Berman-Mendoza, Jorge E. Ortega Aguilar, Rafael García, Elida de Obaldia, Karam Kang, Orlando Auciello, Miguel Jose Yacaman, Greta P. Suchy, Jorge Montes-Gutierrez
Publikováno v:
Diamond and Related Materials. 78:1-11
This paper describes studies to develop hot filament chemical vapor deposition (HFCVD)/Bias Enhance Nucleation-Bias Enhance Growth (BEN-BEG) process for nucleation/grow of relatively large area uniform multifunctional ultrananocrystalline diamond (UN