Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Gregory E. Valentin"'
Publikováno v:
21st Annual BACUS Symposium on Photomask Technology.
The need for higher yields on high-value masks has heightened the mask making industry's sensitivity to mask defects. Decreasing the number of mask defects has necessitated improvements in the material handling throughout the production line, and in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b40947328901ee2eca832b0ee9ce70a6
https://doi.org/10.1117/12.458320
https://doi.org/10.1117/12.458320
Publikováno v:
SPIE Proceedings.
The write time of an ALTA 3000HT mask writer has been observed to be up to 36% better than that of the ALTA 3000 system. The ALTA 3000HT system enables users to meet their performance requirements at increased production capacity with the use of new
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::df931f60e5f63944ca4b9eb9d5f67c04
https://doi.org/10.1117/12.425085
https://doi.org/10.1117/12.425085
Publikováno v:
SPIE Proceedings.
New writing strategies have been developed to meet the demand for high-volume mask manufacturing. The ALTA® 3000HT system enables users to meet their performance requirements at increased production capacity. The write time of an ALTA 3000HT mask wr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4e3f3a81a76a6e7df7758d41c7fd9b15
https://doi.org/10.1117/12.410724
https://doi.org/10.1117/12.410724
Autor:
Gregory E. Valentin, Henry Chris Hamaker, Lorna D. Hodgson, Mike Pochkowski, Brenda G. Martinez, Jerry Martyniuk
Publikováno v:
SPIE Proceedings.
Modifications have been made to the ALTA R 3500 system to improve critical dimension (CD) control in three ways. First, the mean-to-target performance has been improved by increasing the repeatability of the measurement of optical efficiency, thereby
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a6dd2614582ab1838393a0d5bee06b3f
https://doi.org/10.1117/12.373353
https://doi.org/10.1117/12.373353
Autor:
Gregory E. Valentin
Publikováno v:
Fluids Engineering.
The primary objective of this project was to design and test a manifold that would allow Beckman to measure the fluorescence of micron-size spheres. Specifically, Beckman should be able to measure the intensity and frequency of the spectra for each s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cf77f0bfd51dbfbce9fb9d1cf3a4d886
https://doi.org/10.1115/imece1998-1007
https://doi.org/10.1115/imece1998-1007
Conference
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