Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Gregg D. Espin"'
Publikováno v:
SPIE Proceedings.
A novel technology has been developed whereby a database of reticle specific compensation can be utilized to correct for magnification, rotation, and translational reticle manufacturing errors. Whenever a given reticle is loaded into the stepper, a r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f184059ffa50be40d65b7667369a98aa
https://doi.org/10.1117/12.175468
https://doi.org/10.1117/12.175468
