Low-energy ion damage in semiconductors: A progress report.

Autor: Hu, Evelyn L., Chen, Ching-Hui, Green, Debora L.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1996, Vol. 14 Issue 6, p3632-3636, 5p

Radiation enhanced diffusion of low energy ion-induced damage.

Autor: Chen, Ching-Hui, Green, Debora L., Hu, Evelyn L., Ibbetson, James P., Petroff, Pierre M.

Publikováno v: Applied Physics Letters; 7/1/1996, Vol. 69 Issue 1, p58, 3p, 1 Diagram, 4 Graphs