Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Graham R. Wolstenholme"'
Publikováno v:
Microelectronic Engineering. 19:253-256
In this paper a novel isolation scheme for implementation in alternate metal virtual ground (AMG) EPROM and Flash EEPROM arrays is described. It is shown that, unlike the conventional LOCOS isolation, the new isolation scheme allows the AMO concept t
Autor:
Hosam Haggag, L. Anderson, D. Wenzbauer, P. Nielsen, M. Randolph, J. Beckett, R. Irani, Albert Bergemont, B. Eitan, W. Breinholt, J. Diroll, E. Shacham, L. Hoang, R. Salter, A. Kablanian, S. Pearce, Graham R. Wolstenholme, J. Barrell, R. Kazerounian
Publikováno v:
1993 International Symposium on VLSI Technology, Systems, and Applications Proceedings of Technical Papers.
The alternate metal virtual ground (AMG) has recently been introduced as a scaling concept for an EPROM array. The AMG cell size in a 0.8 mu m technology (2.56 mu m/sup 2/) is smaller than the cell size on a conventional architecture implemented in a
Publikováno v:
Proceedings of IEEE International Electron Devices Meeting.
A new NOR virtual ground flash cell array concept is introduced. A 2.4 um/sup 2/ cell size based on a 0.5 um process is realized, which is a 35% cell size reduction compared with the conventional NOR cell. >
Publikováno v:
Proceedings of 1994 IEEE International Conference on Microelectronic Test Structures.
In this paper a novel and simple but effective stacked gate etch test structure, specific to the requirements of of non-volatile memories, used for the early stages of process development and monitoring of a 0.5 /spl mu/m high density FLASH process i
Autor:
P. Nielson, A. Kablanian, B. Eitan, E. Shacham, J. Perry, R. B. Sethi, K. Chhor, M. Shamay, G.A. Rezvani, Graham R. Wolstenholme, H. Gaffur, P. Kauk, R. Kazerounian, Hosam Haggag, L. Anderson, R. Irani, Albert Bergemont, Anirban Roy
Publikováno v:
International Electron Devices Meeting 1991 [Technical Digest].
The alternate metal virtual ground EPROM array (AMG) is introduced as a new scaling concept. This array dramatically reduces cell size by making poly pitch the only limitation in both X and Y directions. The AMG concept scales cell size by sharing on