Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Grace W. Fang"'
Publikováno v:
2018 IEEE Micro Electro Mechanical Systems (MEMS).
This work reports a 40-MHz lithium niobate-on-oxide (LN/S1O2) micromechanical resonator which simultaneously features a compensated temperature coefficient of frequency (TCf f of −13 ppm/°C and a record high Q > 3,900 in vacuum (Q > 1,600 in air)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e0cec68ff69bf5c6f554ff877e391da0
https://doi.org/10.1109/memsys.2018.8346657
https://doi.org/10.1109/memsys.2018.8346657
Autor:
Sheng-Shian Li, Chi-Hang Chin, Grace W. Fang, Chao-Yu Chen, Gayathri Pillai, Wei-Siang Tan, Cheng-Chi Chen
Publikováno v:
NEMS
This work proposes single crystal X-cut thin film Lithium Niobate (LN) resonators operating in a shear horizontal (SH 0 ) acoustic plate wave mode to achieve a high electromechanical coupling coefficient. In the fabrication process, we take advantage
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cd5a782b3c1e3975caaf62f8d85fdfc4
https://doi.org/10.1109/nems.2016.7758303
https://doi.org/10.1109/nems.2016.7758303