Inline electrical yield versus optical inspection: Correlations, connections and disconnections.

Autor: Zheng, Fan, Salvador, Dave, Gow, Cathy, Kermel, Lori, Rhoads, Bryan, Zhang, Kan, Pan, Xiao, Stahl, Ben, Davies, William, Tessier, Amanda, Crawford, Edward, Sheraw, Rebekah, Ahsan, Ishtiaq, Engel, Brett, Austin, Brad, Xin, Yongchun, Sim, Jang

Publikováno v: 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC); 2016, p451-455, 5p