Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Gordon Kenneth Simcox"'
Publikováno v:
Materials Science and Engineering: B. 2:223-230
The need for moderate and high dose implants at high energies has led to the use of r.f. acceleration techniques for ion implantation. The Eaton NV-1000 implanter is based on the independently phased r.f. linear accelerator (linac), injected with a c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::63354348282bbd769e3d6c8eb95f445b
https://doi.org/10.1016/0921-5107(89)90101-3
https://doi.org/10.1016/0921-5107(89)90101-3
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. :591-595
The high degree of stability and beam purity characteristic of rf acceleration techniques have been well demonstrated with the Eaton NV-1000 ion implanter. The series has been extended to take fuller advantage of the high current capability of the te
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::08e055f57f4b99a3715a51e4aa7fd8b9
https://doi.org/10.1016/0168-583x(89)90254-1
https://doi.org/10.1016/0168-583x(89)90254-1