Výsledky vyhledávání - "Goodwin, Francis G."

Conference

Overlay measurement: hidden error.

Autor: Gould, Christopher J., Goodwin, Francis G., Roberts, William R.

Publikováno v: Proceedings of SPIE; Nov2000 Part 2, Issue 1, p400-415, 16p

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Conference

Deciphering and encoding product overlay: hidden errors.

Autor: Gould, Christopher J., Roberts, William R., Goodwin, Francis G.

Publikováno v: Proceedings of SPIE; Nov2000, Issue 1, p68-79, 12p

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Conference

Optimization of the planarizing performance of a DUV organic bottom antireflective coating for via first dual-damascene process: cooperation to achieve material and process characterization.

Autor: Williams, Paul, Martin, Alice, Strobl, Marlene, Roberts, William R., Goodwin, Francis G., Voelkel, Lars, Feicke, Axel, Trautman, Sean, Lamb III, James E.

Publikováno v: Proceedings of SPIE; Nov2000, Issue 1, p160-168, 9p

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Conference

Characterizing overlay registration of concentric 5X and 1X stepper exposure fields using interfield data.

Autor: Goodwin, Francis G., Pellegrini, Joseph C.

Publikováno v: Proceedings of SPIE; Nov1997, Issue 1, p407-417, 11p

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