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Publikováno v:
Archives of Metallurgy and Materials, Vol vol. 66, Iss No 3, Pp 795-798 (2021)
Molybdenum (Mo) is used to form a barrier layer for metal wiring in displays or semiconductor devices. Recently, researches have been continuously attempted to fabricate Mo sputtering targets through additive manufacturing. In this study, spherical M
Externí odkaz:
https://doaj.org/article/5c654704eab147f5820f3070d9247e8c
