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pro vyhledávání: '"Gonzalez, Pierre Giovanni Mani"'
Autor:
Perez, Israel, Sosa, Victor, Gamboa, Fidel, Galindo, Jose Trinidad Elizalde, Enriquez-Carrejo, Jose L., Farias, Rurik, Gonzalez, Pierre Giovanni Mani
Publikováno v:
Appl. Phys. A, 124, 792, 2018
We investigate the effect of post-deposition annealing (for temperatures from 848 K to 1273 K) on the chemical properties of crystalline Ta$_2$O$_5$ films grown on Si(100) substrates by radio frequency magnetron sputtering. The atomic arrangement, as
Externí odkaz:
http://arxiv.org/abs/1804.09538
Autor:
Perez, Israel, Sosa, Victor, Perera, Fidel Gamboa, Galindo, Jose Trinidad Elizalde, Enriquez-Carrejo, Jose Luis, Gonzalez, Pierre Giovanni Mani
Publikováno v:
Vacuum, 165, 274-282, (2019)
The effect of argon ion bombardment on the chemical properties of crystalline Ta$_2$O$_5$ films grown on Si(100) substrates by radio frequency magnetron sputtering was investigated by X-ray photoelectron spectroscopy. All samples were irradiated for
Externí odkaz:
http://arxiv.org/abs/1804.02067