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MEMS Product Development
In this chapter, we provide details regarding the steps of technology transfer in the context of working with a MEMS wafer foundry. The best practices and guidelines we describe, however, also apply to transferring any component to a third-party volu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmc_________::dbd1d1495eb5f9ecca0752fcb82ecd06
http://europepmc.org/articles/PMC7972085
http://europepmc.org/articles/PMC7972085
