Real-time, in situ film thickness metrology in a 10 Torr W chemical vapor deposition process using an acoustic sensor.

Autor: Henn-Lecordier, L., Kidder, J. N., Rubloff, G. W., Gogol, C. A., Wajid, A.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2003, Vol. 21 Issue 3, p1055-1063, 9p

Automatic process control for artificially layered structures.

Autor: Gogol, C. A., Deutschman, R. A., Bean, J. C.

Publikováno v: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1987, Vol. 5 Issue 4, p2077-2080, 4p

A high-speed high-sensitivity acoustic cell for in-line continuous monitoring of MOCVD precursor gases

Autor: Wajid, A., Gogol, C., Hurd, C., Hetzel, M., Spina, A., Lum, R., McDonald, M., Capik, R.J.

Publikováno v: Journal of Crystal Growth; January 1997, Vol. 170 Issue: 1-4 p237-241, 5p

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