Zobrazeno 1 - 10 of 14 pro vyhledávání: '"Go Okahata"'
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Akademický článek
Development of rotary table grinding machine for large diameter Si wafers (1st report: Performance investigation of water hydrostatic rotary table)
Autor: Jumpei KUSUYAMA, Ayumu HONDA, Takayuki KITAJIMA, Go OKAHATA, Akinori YUI, Toshihiro ITO, A. H. SLOCUM
Publikováno v: Nihon Kikai Gakkai ronbunshu, Vol 82, Iss 842, Pp 16-00190-16-00190 (2016)
Increasing of Si wafer diameter from φ300 mm to φ450 mm is required to enhance productivity of semiconductor devices. The authors developed a high stiff rotary grinding machine, which consists of a rotary table system and a wheel spindle system. Th
Externí odkaz: https://doaj.org/article/6e8c8212acd3456f96963fec94eddea6
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Development of Rotary Work Table with Constant-Flow Hydrostatic Water Bearing for Large Scale Silicon-Wafer Grinding Machine
Autor: Alexander H. Slocum, Akinori Yui, Go Okahata, Shigeki Okuyama, Hirotsugu Saito, Takayuki Kitajima
Publikováno v: Advanced Materials Research. 1017:604-609
There is a compelling need for development of a surface grinding machine for 450mm diameter silicon-wafers. The authors have developed a new surface grinding machine for the large scale silicon-wafers. The machine has a rotary work table equipped wit
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::b8e3c0aed02091508ee008d4fd75cc07
https://doi.org/10.4028/www.scientific.net/amr.1017.604
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7
Effect of Lubricants on Precision Planing of Tungsten Carbide Using Mono-Crystalline Diamond Tool
Autor: Hiroshi Matsuoka, Akinori Yui, Shigeki Okuyama, Go Okahata, Takayuki Kitajima
Publikováno v: Advanced Materials Research. 325:159-164
Rubbing tests between a diamond stick and a tungsten carbide plate and planing experiments of cobalt-free tungsten carbide using a mono-crystalline diamond tool are conducted, and the effect of lubricants on tool wear is investigated. Five kinds of l
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::66fe8bc1eb72154bb1024f22c420e4f2
https://doi.org/10.4028/www.scientific.net/amr.325.159
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8
Numerical Study on Constant-Flow Hydrostatic Water Bearing for a Machine-Tool Table
Autor: Akinori Yui, Shigeki Okuyama, Go Okahata
Publikováno v: Advanced Materials Research. 325:357-362
Precision machine tools using hydrostatic water bearings are superior to those using hydrostatic oil bearings in terms of environmental protection, worker’s safety, and cost. As for hydrostatic water bearings, a constant-flow type is more suitable
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::5a2db078911730f28da830d34835bb35
https://doi.org/10.4028/www.scientific.net/amr.325.357
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9
Development of a Linear-Motor-Driven Table Supported by Hydrostatic Water Bearings: Effect of Air Volume Contained in Water-Supply Tube on Pitching Motion of Table Slider
Autor: Hisashi Kobayashi, Akinori Yui, Go Okahata, Shigeki Okuyama, Alexander H. Slocum
Publikováno v: Key Engineering Materials. :508-512
A linear-motor-driven table supported by hydrostatic-water bearings had been developed. The table slider is supported by a single-sided recess type bearing system and preloaded by attractive force using a linear-motor magnet. Since eccentric excitati
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::dd925a615958029c57a6df7b0a2cb744
https://doi.org/10.4028/www.scientific.net/kem.447-448.508
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10
Non-oscillatory behavior and dynamic stability of a thin shell subjected to follower forces with small disturbances
Autor: Nobuyoshi Fukuchi, Go Okahata
Publikováno v: Thin-Walled Structures. 43:225-236
The deformation and dynamic behavior mechanism of submerged thin shell structures are in principle of a non-conservative nature as circulatory system, and the disturbance forces of various types exist in a marine environment. This paper describes a c
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::794b6515cf3db2e9d79795c106892792
https://doi.org/10.1016/j.tws.2004.07.004
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