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pro vyhledávání: '"Giri Nallapadi"'
Autor:
Da Yang, Geoffrey Yeap, Periannan Chidambaram, Giri Nallapadi, S. C. Song, Chock H. Gan, John Jianhong Zhu, Jeff Xu
Publikováno v:
SPIE Proceedings.
How to maintain the Moore’s Law scaling beyond the 193 immersion resolution limit is the key question semiconductor industry needs to answer in the near future. Process complexity will undoubtfully increase for 14nm node and beyond, which brings bo