Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Giorgio Pirovano"'
Autor:
Arnaud Mader, Adam Brunton, Klaus Bergmann, Giorgio Pirovano, Giovanni Bianucci, Hans Scheuermann, Peter Zink, Gian Luca Cassol, Fabio Zocchi, Oliver Franken
Publikováno v:
SPIE Proceedings.
The paper presents the results of an investigation into the thermal and optical characteristics of alpha-type dual-mirror grazing incidence collectors for Extreme Ultra-violet Lithography integrated into a tin-fueled discharge produced plasma source.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::da88e809a3ee66a75d6db7ec894ee910
https://doi.org/10.1117/12.772977
https://doi.org/10.1117/12.772977
Autor:
Giovanni Bianucci, Max C. Schürmann, Fabio Zocchi, Fabio Marioni, Pietro Binda, Denis Bolshukhin, L. Porreca, Giorgio Pirovano, Imtiaz Ahmad, Gian Luca Cassol
Publikováno v:
SPIE Proceedings.
A dual-mirror grazing incidence collector produced by Media Lario Technologies was integrated into a high-power, Xefueled gas discharge produced plasma (GDPP) source test stand at XTREME technologies, and tested at power levels responding to the prod
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::57d17a8ae18dcba621b8c1c525786ae3
https://doi.org/10.1117/12.712241
https://doi.org/10.1117/12.712241