Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Giorgio Allegato"'
Thelma-double: A New Technology Platform for Manufacturing of High-Performance Mems Inertial Sensors
Autor:
Federico Vercesi, Lorenzo Corso, Giorgio Allegato, Gabriele Gattere, Luca Guerinoni, Carlo Valzasina, Andrea Nomellini, Anna Alessandri, Ilaria Gelmi
Publikováno v:
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS).
Publikováno v:
Silicon Sensors and Actuators ISBN: 9783030801342
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::960e7bfaefa52d22209048cc4d28fb9e
https://doi.org/10.1007/978-3-030-80135-9_13
https://doi.org/10.1007/978-3-030-80135-9_13
Publikováno v:
Silicon Sensors and Actuators ISBN: 9783030801342
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f3e2afd891c9cdd580eff379d2e9fc85
https://doi.org/10.1007/978-3-030-80135-9_16
https://doi.org/10.1007/978-3-030-80135-9_16
Publikováno v:
Silicon Sensors and Actuators ISBN: 9783030801342
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3d8030dc41fe84a51acb408c9354eb1b
https://doi.org/10.1007/978-3-030-80135-9_14
https://doi.org/10.1007/978-3-030-80135-9_14
Autor:
Timo Aalto, Veli-Matti Airaksinen, Stephan Gerhard Albert, Giorgio Allegato, Marco Amiotti, Olli Anttila, Juergen Auersperg, Antonio Bonucci, Indranil Ronnie Bose, Tanja Braun, Mikael Broas, J. Burggraf, Christopher Cameron, Rob N. Candler, Zhen Cao, André Cardoso, Kuo-Shen Chen, Andrea Conte, Adriana Cozma, Cristina E. Davis, Sophia Dempwolf, Pradeep Dixit, Michael Dost, Viorel Dragoi, Simo Eränen, Bruno Fain, B. Figeys, Andreas C. Fischer, Christoph Flötgen, Sami Franssila, Alois Friedberger, Marc Fueldner, Maria Ganchenkova, Pilar Gonzalez, Miguel A. Gosálvez, Michael Grimes, Atte Haapalinna, Paul Hagelin, Paul Hammond, Kimmo Henttinen, Vesa Henttonen, David Horsley, Takeo Hoshi, Satoshi Itoh, Henrik Jakobsen, R. Jansen, Kerstin Jonsson, Dirk Kähler, Harindra Kumar Kannojia, Hannu Kattelus, Gudrun Kissinger, Roy Knechtel, Kathrin Knese, Kai Kolari, Mika Koskenvuori, Heikki Kuisma, Amit Kulkarni, Franz Laermer, Christof Landesberger, Christina Leinenbach, Michael K. LeVasseur, Jue Li, Yuyuan Lin, Paul F. Lindner, K. Lodewijks, Fabian Lofink, Giorgio Longoni, Sebastian Markus Luber, M. Mahmud-ul-hasan, Jari Mäkinen, Matti Mäntysalo, Devin Martin, Federico Maspero, Toni T. Mattila, Luca Mauri, Peter Merz, Doug Meyer, Marco Moraja, Teruaki Motooka, Gerhard Müller, Paul Muralt, Risto M. Nieminen, Frank Niklaus, Laura Oggioni, Juuso Olkkonen, Elmeri Österlund, Kuang-Shun Ou, Jari Paloheimo, Toni P. Pasanen, Mervi Paulasto-Kröckel, Thomas Plach, Jean-Philippe Polizzi, Klaus Pressel, Matti Putkonen, Riikka L. Puurunen, Wolfgang Reinert, Enea Rizzi, V. Rochus, Glenn Ross, X. Rottenberg, Lauri Sainiemi, Hele Savin, Harald Schenk, Marc Schikowski, Matthias Schulze, S. Seema, S. Severi, Lasse Skogström, Tadatomo Suga, Scott Sullivan, Tommi Suni, Horst Theuss, Markku Tilli, H.A.C. Tilmans, Ilkka Tittonen, Hannah Tofteberg, Pekka Törmä, Santeri Tuomikoski, Frode Tyholdt, Tsuyoshi Uda, Örjan Vallin, Carlo Valzasina, Timo Veijola, Eeva Viinikka, Dietmar Vogel, Andreas Vogl, Vesa Vuorinen, W.J. Westervelde, Sebastian Wicht, Robert Wieland, Bernhard Winkler, Levent Yobas, Luca Zanotti, I. Zubel
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::16f0bddf47c3d8c3eaa0f0359a359b22
https://doi.org/10.1016/b978-0-12-817786-0.00065-7
https://doi.org/10.1016/b978-0-12-817786-0.00065-7