Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Gilyoung Choi"'
Publikováno v:
Materials, Vol 16, Iss 14, p 5043 (2023)
In this work, we discuss the effects of component ratios on plasma characteristics, chemistry of active species, and silicon etching kinetics in CF4 + O2, CHF3 + O2, and C4F8 + O2 gas mixtures. It was shown that the addition of O2 changes electrons-
Externí odkaz:
https://doaj.org/article/bc79398fe7d646e6abcd2cffe3036436
Publikováno v:
Energy Reports, Vol 6, Iss , Pp 214-220 (2020)
A government plan was announced to expand the share of renewable energy to 20 percent by 2030 in Korea and to construct additional pumped hydro storage (PHS) to prepare for the uncertainty of renewable generation. However, due to the distortion of th
Externí odkaz:
https://doaj.org/article/c3c7943698674d02a98e6b6cedc611c1
Publikováno v:
Vacuum. 206:111518
Publikováno v:
Plasma Processes and Polymers. 20:2200167
Publikováno v:
Korean Journal of Environmental Health Sciences. 43:176-184
Publikováno v:
2009 IEEE Antennas & Propagation Society International Symposium; 2009, p1-4, 4p
Publikováno v:
2008 IEEE Antennas & Propagation Society International Symposium; 2008, p1-4, 4p
Publikováno v:
2006 IEEE Antennas & Propagation Society International Symposium; 2006, p619-622, 4p
Publikováno v:
Microwave & Optical Technology Letters; Nov2008, Vol. 50 Issue 11, p2978-2981, 4p, 1 Color Photograph, 1 Diagram, 4 Graphs