Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Giinter Wilkening"'
Autor:
Frank Pohlenz, Rolf Krüger-Sehm, Klaus Hasche, Hans-Ulrich Danzebrink, Giinter Wilkening, Lena Jung, Gaoliang Dai
Publikováno v:
Measurement Science and Technology. 15:2039-2046
A new method for traceable measurement of micro-roughness by using a newly developed metrological large range scanning force microscope (LR-SFM) is described. The LR-SFM has an Abbe error free design and direct interferometric position measurement ca
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ba6b0dd222556472e6152d1ffcc2c3bc
https://doi.org/10.1088/0957-0233/15/10/013
https://doi.org/10.1088/0957-0233/15/10/013
