Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Giehl, Alexander R."'
Autor:
Giehl, Alexander R., Gumbel, Michael, Kessler, Matthias, Herhammer, Norbert, Hoffmann, Goetz, Fouckhardt, Henning
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2003, Vol. 21 Issue 6, p2393-2397, 5p
Autor:
Giehl, Alexander R., Kessler, Matthias, Grosse, Axel, Herhammer, Norbert, Fouckhardt, Henning
Publikováno v:
Journal of Micromechanics & Microengineering; Mar2003, Vol. 13 Issue 2, p1-1, 1p