Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Gianina Schondelmaier"'
Autor:
Dominik Weber, Robert Heimburger, Gianina Schondelmaier, Toni Junghans, Annika Zetzl, Dietrich R. T. Zahn, Daniel Schondelmaier
Publikováno v:
SN Applied Sciences, Vol 5, Iss 1, Pp 1-11 (2022)
Abstract Abstract This article presents a cost-effective ultraviolet-ozone cleaner (UV/O3 Cleaner) for surface pre-treatment of substrates in the field of semiconductor technology. The cleaner consists of two chambers, the upper one contains the elec
Externí odkaz:
https://doaj.org/article/c9064aa06df44bc1aecf9cb653355d54
Autor:
Dirk Hildebrand, Daniel Schondelmaier, Christian Walther, Toni Junghans, Gianina Schondelmaier, Robert Heimburger, Dominik Weber
Publikováno v:
Applied Physics A. 125
Laser interference lithography is a widely used technology for large-area patterning of surfaces on the micro- and nanoscale. It is mostly used for research purposes due to the limited area that can be uniformly patterned due to the Gaussian intensit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::26ce37a622aa5dfdf8d72434bf02bc9e
https://doi.org/10.1007/s00339-019-2538-4
https://doi.org/10.1007/s00339-019-2538-4
Autor:
Peter Meszmer, Gianina Schondelmaier, Alexey Shaporin, Dietrich R. T. Zahn, J. Arnold, Karla Hiller, Raul D. Rodriguez, Steffen Hartmann, Jan Mehner, Daniel May, Bernhard Wunderle
Publikováno v:
Microsystem Technologies. 20:1041-1050
In this paper, a novel concept of a thermo-mechanical MEMS actuator using aluminum thin-film heaters on a thermal oxide for electrical insulation is presented. The actuator is part of an universal tensile testing platform for thermo-mechanical materi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fc0309df547524eab1b6e4a3a22d27d2
https://doi.org/10.1007/s00542-014-2143-6
https://doi.org/10.1007/s00542-014-2143-6