Stiffness modelling of various types of atomic force microscopy cantilevers in 3D and validation of the models by finite element method

Autor: Korayem, MH, Ghahnaviyeh, SD, Saraee, MB

Publikováno v: Proceedings of the Institution of Mechanical Engineers, Part K: Journal of Multi-body Dynamics; December 2017, Vol. 231 Issue: 4 p765-775, 11p