Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Gert Streutker"'
Autor:
Joost Bekaert, Dirk Jürgens, Gert Streutker, Wilfred Endendijk, J. Verbeeck, Robert John Socha, Andre Engelen, Bert van Drieenhuizen, Daniel Corliss, Melchior Mulder, Anita Bouma, Cas Johannes Petrus Maria Van Nuenen, Greg McIntyre, Bastian Trauter, Oscar Noordman, Joerg Zimmermann, Robert Kazinczi, Bart Laenens, Wim Bouman
Publikováno v:
SPIE Proceedings.
This paper describes the principle and performance of FlexRay, a fully programmable illuminator for high NA immersion systems. Sources can be generated on demand, by manipulating an array of mirrors instead of the traditional way of inserting optical
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::156a83ca3e2ac3da0d5d3302a3f396f2
https://doi.org/10.1117/12.845984
https://doi.org/10.1117/12.845984
Autor:
Melchior Mulder, Bert van Drieenhuizen, Stephen Hsu, Michael Patra, András G. Major, Dirk Jürgens, Keith Gronlund, Oscar Noordman, Johannes Eisenmenger, Markus Degünther, Robert Kazinczi, Gert Streutker, Andre Engelen
Publikováno v:
SPIE Proceedings.
This paper describes the principle and performance of a fully programmable illuminator for a high-NA immersion system. Sources can be generated on demand, by manipulating an array of mirrors instead of the traditional way of inserting optical element
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2c21d3566eade6a24a218673676d0051
https://doi.org/10.1117/12.837035
https://doi.org/10.1117/12.837035
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