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pro vyhledávání: '"Geremy Loachamín-Suntaxi"'
Autor:
Geremy Loachamín-Suntaxi, Paris Papavasileiou, Eleni D. Koronaki, Dimitrios G. Giovanis, Georgios Gakis, Ioannis G. Aviziotis, Martin Kathrein, Gabriele Pozzetti, Christoph Czettl, Stéphane P.A. Bordas, Andreas G. Boudouvis
Publikováno v:
Chemical Engineering Journal Advances, Vol 20, Iss , Pp 100667- (2024)
This work introduces a comprehensive approach utilizing data-driven methods to elucidate the deposition process regimes in Chemical Vapor Deposition (CVD) reactors and the interplay of physical mechanism that dominate in each one of them. Through thi
Externí odkaz:
https://doaj.org/article/4e9abd65e7e242f6ba248349f64fd7b0